fabrication of stacked cmp pads

Fabrication of Stacked CMP Pads

Adhesives Research offers pad manufacturers a robust specialty pressure-sensitive adhesive (PSA) that is designed to maintain the integrity of the pad for extended wear during polishing. Our double-coated ARclad® product features two permanent adhesive chemistries.

The first side is designed to bond specifically to the top pad; the second is tailored to bond to the foam sub-pad.

Product Information
ARclad® 7970-39 2 mil heat-activated adhesive tape
ARclad® 8027 3 mil heat-activated adhesive tape
ARclad® 93020 2.5 mil delayed cure adhesive