
Fabrication of Stacked CMP Pads
Adhesives Research offers pad manufacturers a robust specialty pressure-sensitive adhesive (PSA) that is designed to maintain the integrity of the pad for extended wear during polishing. Our double-coated ARclad® product features two permanent adhesive chemistries.
The first side is designed to bond specifically to the top pad; the second is tailored to bond to the foam sub-pad.
Product Information | |
---|---|
ARclad® 7970-39 | 2 mil heat-activated adhesive tape |
ARclad® 8027 | 3 mil heat-activated adhesive tape |
ARclad® 93020 | 2.5 mil delayed cure adhesive |